Patent Assignment
Reel/Frame 028341/0088
Assignment of Assignor's Interest
Recorded: 2012-06-08
Pages: 6
Assignors
KATO, HITOSHI
Executed: 2012-06-06
USHIKUBO, SHIGEHIRO
Executed: 2012-06-06
TAMURA, TATSUYA
Executed: 2012-06-06
OZAKI, SHIGENORI
Executed: 2012-06-06
KUMAGAI, TAKESHI
Executed: 2012-06-06
KIKUCHI, HIROYUKI
Executed: 2012-06-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Method and Film Deposition Apparatus