Patent Assignment
Reel/Frame 028501/0237
Assignment of Assignor's Interest
Recorded: 2012-07-06
Pages: 3
Assignor
GRIMBERGEN, MICHAEL
Executed: 2012-01-06
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Etch Rate Detection for Anti-Reflective Coating Layer and Absorber Layer Etching