Patent Assignment
Reel/Frame 028503/0213
Assignment of Assignor's Interest
Recorded: 2012-07-05
Pages: 2
Assignor
LEE, SEUNG WOOK
Executed: 2012-03-06
Assignee
LG SILTRON INC.
274, IMSU-DONG, GUMI-SI, GYEONGBUK, 730-350, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Measuring Impurities on Wafer and Method of Measuring Impurities on Wafer