Patent Assignment
Reel/Frame 028518/0868
Assignment of Assignor's Interest
Recorded: 2012-07-02
Pages: 5
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810-4169
Covered Property
(1)
Silicon Precursors for Low Temperature Ald of Silicon-Based Thin-Films
Application:
61/652,010 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.