Patent Application
Provisional
App. No. 61/652,010
· Confirmation No. 5348
SILICON PRECURSORS FOR LOW TEMPERATURE ALD OF SILICON-BASED THIN-FILMS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-06-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-05-25 | SPEC |
Specification | 11 | View | |
| 2012-05-25 | CLM |
Claims | 4 | View | |
| 2012-05-25 | ABST |
Abstract | 1 | View | |
| 2012-05-25 | DRW.NONBW |
Drawings-other than black and white line drawings | 1 | View | |
| 2012-05-25 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2012-05-25 | ADS |
Application Data Sheet | 4 | View | |
| 2012-05-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-05-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2012-05-25 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 0001-01-03 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Thomas M. Cameron
Newtown, CT
Susan V. DiMeo
New City, NY
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23448
- Docket No.
- 2771-1078-PRV
- Confirmation No.
- 5348
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2012-07-02
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Quick Facts
- App. No.
- 61/652,010
- Filed
- 2012-05-25
External Links