Patent Assignment
Reel/Frame 028519/0651
Assignment of Assignor's Interest
Recorded: 2012-07-10
Pages: 3
Assignor
CHANG, CHING-YU
Executed: 2012-05-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Photosensitive Material and Method of Lithography