Patent Assignment
Reel/Frame 028698/0607
Assignment of Assignor's Interest
Recorded: 2012-08-01
Pages: 6
Assignors
SHIH, CHIH-TSUNG
Executed: 2012-07-16
HSU, PEI-CHUNG
Executed: 2012-07-16
YU, SHINN-SHENG
Executed: 2012-07-16
WU, TSIAO-CHEN
Executed: 2012-07-16
LU, YEN-CHENG
Executed: 2012-07-16
CHANG, SHU-HAO
Executed: 2012-07-16
CHEN, CHIA-JEN
Executed: 2012-07-16
LEE, HSIN-CHANG
Executed: 2012-07-16
YEN, ANTHONY
Executed: 2012-07-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Phase Shift Mask for Extreme Ultraviolet Lithography and Method of Fabricating Same