Patent Assignment
Reel/Frame 028789/0069
Assignment of Assignor's Interest
Recorded: 2012-08-15
Pages: 2
Assignor
SHIRAIWA, NORIO
Executed: 2012-06-18
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI,, NAGANO-SHI, NAGANO, 381-2287, JAPAN
Covered Property
(1)
Electrostatic Chuck and Semiconductor/Liquid Crystal Manufacturing Equipment