Corrective Assignment to Correct the Application Number from 12/437,678 to 13/437,678. Previously Recorded on Reel 028594 Frame 0965. Assignor(S) Hereby Confirms the the Correct Application Number Is 13/437,678..

Recorded: 2012-08-22 Pages: 4

Assignor

KOMATSU LTD.

Executed: 2012-07-13

Assignee

GIGAPHOTON INC

400 YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-8558, JAPAN

Covered Properties (4)

Semiconductor Exposure Device Using Extreme Ultra Violet Radiation

Patent: 8,227,778 →

Application: 12/469,176 →

Publication: US 2009/0267003

Extreme Ultraviolet Light Source Device

Patent: 8,853,656 →

Application: 12/535,014 →

Publication: US 2010/0025223

Mirror for Extreme Ultra Violet, Manufacturing Method for Mirror for Extreme Ultra Violet, and Far Ultraviolet Light Source Device

Patent: 8,592,787 →

Application: 13/437,678 →

Publication: US 2012/0248342

Semiconductor Exposure Device Using Extreme Ultra Violet Radiation

Patent: 8,507,885 →

Application: 13/494,778 →

Publication: US 2012/0256105

Related Assignments (3)

Other recorded transfers of the patents in this record — the chain of ownership.