Patent Assignment
Reel/Frame 028870/0257
Assignment of Assignor's Interest
Recorded: 2012-08-29
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Multi Charged Particle Beam Writing Apparatus and Multi Charged Particle Beam Writing Method