Patent Assignment
Reel/Frame 028884/0735
Assignment of Assignor's Interest
Recorded: 2012-08-29
Pages: 3
Assignors
TAKASE, HIROMITSU
Executed: 2012-04-19
TANAKA, ICHIRO
Executed: 2012-04-19
MIYAKE, AKIRA
Executed: 2012-04-20
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
In Situ Cleaning Device for Lithographic Apparatus