Patent Assignment
Reel/Frame 028931/0540
Assignment of Assignor's Interest
Recorded: 2012-09-05
Pages: 5
Assignor
MICRON TECHNOLOGY, INC.
Executed: 2009-12-30
Assignee
ROUND ROCK RESEARCH, LLC
P. O. BOX 1042, MOUNT KISCO, NEW YORK, 10549
Covered Property
(1)
Differential Pressure Application Apparatus for Use in Polishing Layers of Semiconductor Device Structures and Methods