Patent Assignment
Reel/Frame 028967/0662
Assignment of Assignor's Interest
Recorded: 2012-09-17
Pages: 2
Assignor
ARNZ, MICHAEL
Executed: 2012-08-30
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for the Position Determination of Structures on a Mask for Microlithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.