Patent Assignment
Reel/Frame 028967/0745
Assignment of Assignor's Interest
Recorded: 2012-09-17
Pages: 2
Assignor
SEIDEL, DIRK
Executed: 2012-09-05
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Apparatus for the Position Determination of Structures on a Mask for Microlithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.