Patent Assignment
Reel/Frame 028970/0555
Assignment of Assignor's Interest
Recorded: 2012-09-17
Pages: 4
Assignors
HIGASHIJIMA, JIRO
Executed: 2012-07-04
ITO, NORIHIRO
Executed: 2012-07-04
OGATA, NOBUHIRO
Executed: 2012-08-01
NAGAMINE, SHUICHI
Executed: 2012-07-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus for Separating Processing Solution and Atmosphere from Each Other Within Collection Cup