Patent Assignment
Reel/Frame 029134/0723
Assignment of Assignor's Interest
Recorded: 2012-10-15
Pages: 2
Assignors
OTA, YOSUKE
Executed: 2012-09-14
AKAE, NAONORI
Executed: 2012-09-14
HIROSE, YOSHIRO
Executed: 2012-09-14
SASAJIMA, RYOTA
Executed: 2012-09-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus and Non-Transitory Computer Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.