Patent Assignment
Reel/Frame 029163/0699
Assignment of Assignor's Interest
Recorded: 2012-10-19
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.