Substrate processing apparatus and method for manufacturing semiconductor device
A substrate processing apparatus includes a process chamber which processes a substrate, a conductive substrate support table which is installed within the process chamber, a dielectric plate on which the substrate is mounted, the dielectric plate being placed on the substrate support table, a microwave generator which is installed outside the process chamber, and a microwave supplying unit which supplies a microwave generated by the microwave generator into the process chamber.
1. A substrate processing apparatus comprising:
a process chamber configured to process a substrate;
a conductive substrate support table provided within the process chamber;
a dielectric plate on which the substrate is mounted, the dielectric plate being placed on the substrate support table;
a microwave generator generating a microwave of a predetermined frequency and provided outside the process chamber; and
a microwave supplying unit having a wave guide port that irradiates a heating target formed on a surface of the substrate with a microwave generated by the microwave generator to the surface of the substrate;
wherein a product of a dielectric constant and a dielectric tangent of the dielectric plate is smaller than a product of a dielectric constant and a dielectric tangent of the heating target; and
a thickness of the dielectric plate is within a (λ/8)*(∈) −1/2 range centered on an odd-number times of (λ/4)×(∈) −1/2 , wherein, λ is a wavelength of the supplied microwave in a vacuum and ∈ is the dielectric constant of the dielectric plate.
2. The substrate processing apparatus of claim 1 , wherein the substrate support table comprises a cooling structure.
3. The substrate processing apparatus of claim 1 , wherein a temperature detector configured to measure a temperature of the dielectric plate is disposed in the dielectric plate.
4. A method for manufacturing a semiconductor device by using a substrate processing apparatus including a process chamber configured to process a substrate, a conductive substrate support table provided within the process chamber, a dielectric plate on which the substrate is mounted, the dielectric plate being placed on the substrate support table, a microwave generator provided outside the process chamber, and a microwave supplying unit having a wave guide port that irradiates the substrate with a microwave generated by the microwave generator into the process chamber, the method comprising:
carrying the substrate into the process chamber and mounting the substrate on the dielectric plate placed on the substrate support table;
selecting a frequency of a microwave, which selectively heats a heating target formed on a surface of the substrate, in accordance with a product of a dielectric constant and a dielectric tangent of the dielectric plate and a product of a dielectric constant and a dielectric tangent of the dielectric plate and a product of a dielectric constant and a dielectric tangent of the heating target;
heating the heating target by irradiating the heating target with the microwave having the selected frequency from the microwave supplying unit to the surface of the substrate; and
carrying the substrate out of the process chamber after processing the substrate,
wherein a product of a dielectric constant and a dielectric tangent of the dielectric plate is smaller than a product of a dielectric constant and a dielectric tangent of the heating target, and
a thickness of the dielectric plate is within a (λ/8)*(∈) −1/2 range centered on and odd-number times of (λ/4)×(∈) −1/2 , wherein, λ is a wavelength of the supplied microwave in a vacuum and ∈ is the dielectric constant of the dielectric plate.
5. The substrate processing apparatus of claim 1 , wherein the heating target formed on the surface of the substrate is a high-k film.
6. The substrate processing apparatus of claim 1 , wherein the heating target formed on the surface of the substrate is a polyimide film.