Patent Assignment
Reel/Frame 029238/0601
Assignment of Assignor's Interest
Recorded: 2012-10-26
Pages: 4
Assignors
HIROSE, YOSHIRO
Executed: 2012-10-10
KANAYAMA, KENJI
Executed: 2012-10-15
MIZUNO, NORIKAZU
Executed: 2012-10-11
TAKASAWA, YUSHIN
Executed: 2012-10-11
OTA, YOSUKE
Executed: 2012-10-11
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device, Method for Processing Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.