Patent Assignment
Reel/Frame 029262/0067
Assignment of Assignor's Interest
Recorded: 2012-11-08
Pages: 3
Assignors
THOMAS, GEORGE
Executed: 2012-11-06
WONGSENAKHUM, PANYA
Executed: 2012-11-06
JUAREZ, FRANCISCO J.
Executed: 2012-11-06
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Hybrid Impedance Matching for Inductively Coupled Plasma System