Patent Assignment
Reel/Frame 029292/0711
Assignment of Assignor's Interest
Recorded: 2012-11-14
Pages: 3
Assignors
SUGITA, KIPPEI
Executed: 2012-11-06
MATSUDA, KENJI
Executed: 2012-11-06
HASHIMOTO, HIROYUKI
Executed: 2012-11-06
HARADA, MUNEO
Executed: 2012-10-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device