Patent Assignment
Reel/Frame 029357/0658
Assignment of Assignor's Interest
Recorded: 2012-11-27
Pages: 3
Assignors
YAMAZAKI, SHUNPEI
Executed: 2012-11-13
NAKASHIMA, MOTOKI
Executed: 2012-11-14
TAKAHASHI, MASAHIRO
Executed: 2012-11-19
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing a Thin Film Semiconductor Device