Method for manufacturing a thin film semiconductor device
A highly reliable semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device is manufactured with a high yield, so that high productivity is achieved. In a semiconductor device including a transistor in which a source electrode layer and a drain electrode layer are provided over and in contact with an oxide semiconductor film, entry of impurities and formation of oxygen vacancies in an end face portion of the oxide semiconductor film are suppressed. This can prevent fluctuation in the electric characteristics of the transistor which is caused by formation of a parasitic channel in the end face portion of the oxide semiconductor film.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming a gate electrode layer over a substrate having an insulating surface;
forming a gate insulating film over the gate electrode layer;
forming an oxide semiconductor film having a tapered end face portion over the gate insulating film, wherein the oxide semiconductor film is a c-axis aligned crystalline oxide semiconductor;
forming a conductive film over the oxide semiconductor film;
etching the conductive film with an etching gas comprising halogen to form a source electrode layer and a drain electrode layer each overlapping with the gate electrode layer and a part of the tapered end face portion;
removing an element contained in the etching gas from the exposed rest of the tapered end face portion after etching the conductive film;
adding oxygen to the exposed rest of the tapered end face portion after etching the conductive film; and
forming a first protective insulating film over the oxide semiconductor film, the source electrode layer, and the drain electrode layer.
2. The method for manufacturing the semiconductor device according to claim 1 , wherein the etching step is performed by a plasma treatment.
3. The method for manufacturing the semiconductor device according to claim 1 , further comprising the step of adding oxygen to the first protective insulating film after forming the first protective insulating film.
4. The method for manufacturing the semiconductor device according to claim 3 , further comprising the step of forming a second protective insulating film comprising aluminum oxide over the first protective insulating film.
5. The method for manufacturing the semiconductor device according to claim 1 , wherein the oxide semiconductor film comprises indium, zinc and one or more metal elements selected from gallium, aluminum, manganese, cobalt, tin, hafnium, and zirconium.
6. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor film having a tapered end face portion over a substrate having an insulating surface, wherein the oxide semiconductor film is a c-axis aligned crystalline oxide semiconductor;
forming a conductive film over the oxide semiconductor film;
etching the conductive film with an etching gas comprising halogen to form a source electrode layer and a drain electrode layer each overlapping with a part of the tapered end face portion;
removing an element contained in the etching gas from the exposed rest of the tapered end face portion after etching the conductive film;
adding oxygen to the exposed rest of the tapered end face portion after etching the conductive film; and
forming a first protective insulating film over the oxide semiconductor film, the source electrode layer, and the drain electrode layer.
7. The method for manufacturing the semiconductor device according to claim 6 , wherein the etching step is performed by a plasma treatment.
8. The method for manufacturing the semiconductor device according to claim 6 , further comprising the step of adding oxygen to the first protective insulating film after forming the first protective insulating film.
9. The method for manufacturing the semiconductor device according to claim 8 , further comprising the step of forming a second protective insulating film comprising aluminum oxide over the first protective insulating film.
10. The method for manufacturing the semiconductor device according to claim 6 , wherein the oxide semiconductor film comprises indium, zinc, and one or more metal elements selected from gallium, aluminum, manganese, cobalt, tin, hafnium, and zirconium.
11. The method for manufacturing the semiconductor device according to claim 1 , wherein a chlorine concentration in the exposed rest of the tapered end face portion is lower than or equal to 5×10 18 atoms/cm 3 .
12. The method for manufacturing the semiconductor device according to claim 6 , wherein a chlorine concentration in the exposed rest of the tapered end face portion is lower than or equal to 5×10 18 atoms/cm 3 .
13. The method for manufacturing the semiconductor device according to claim 1 ,
wherein a concentration of the element in the part of the tapered end face portion is lower than a concentration of the element in the exposed rest of the tapered end face portion, and
wherein the element is one of chlorine and fluorine.
14. The method for manufacturing the semiconductor device according to claim 6 ,
wherein a concentration of the element in the part of the tapered end face portion is lower than a concentration of the element in the exposed rest of the tapered end face portion, and
wherein the element is one of chlorine and fluorine.