Patent Assignment
Reel/Frame 029463/0741
Assignment of Assignor's Interest
Recorded: 2012-12-13
Pages: 6
Assignors
HARA, KENICHI
Executed: 2012-10-02
YAMADA, ISAO
Executed: 2012-10-11
TOYODA, NORIAKI
Executed: 2012-10-11
HAYAKAWA, TAKASHI
Executed: 2012-10-04
Assignees
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
HYOGO PREFECTURE
5-10-1, SHIMOYAMATE-DORI, CHUO-KU, KOBE-SHI, HYOGO, JAPAN
Covered Property
(1)
Etching Method, Etching Apparatus, and Storage Medium