Patent Assignment
Reel/Frame 029468/0824
Assignment of Assignor's Interest
Recorded: 2012-12-14
Pages: 3
Assignors
RATHSACK, BENJAMEN M.
Executed: 2012-05-15
SOMERVELL, MARK H.
Executed: 2012-05-15
GANDHI, MEENAKSHISUNDARAM
Executed: 2012-05-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, MINATOKU, 3-1 AKASAKA 5-CHOME, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming Patterns Using Block Copolymers and Articles Thereof