Patent Assignment
Reel/Frame 029540/0250
Assignment of Assignor's Interest
Recorded: 2012-12-28
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Program
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.