Patent Assignment
Reel/Frame 029570/0528
Assignment of Assignor's Interest
Recorded: 2012-12-10
Pages: 7
Assignors
WACK, DANIEL C.
Executed: 2012-10-04
KVAMME, DAMON F.
Executed: 2012-10-04
ROGERS, JOHN R.
Executed: 2012-10-04
MCGUIRE JR., JAMES P.
Executed: 2012-10-04
RODGERS, JOHN M.
Executed: 2012-11-28
Assignee
KLA-TENCOR CORPORATION
1 TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus for Euv Imaging and Methods of Using Same