Apparatus for EUV imaging and methods of using same
One embodiment relates to an apparatus that includes an illumination source ( 102 ) for illuminating a target substrate ( 106 ), objective optics ( 108 ) for projecting the EUV light which is reflected from the target substrate, and a sensor ( 110 ) for detecting the projected EUV light. The objective optics includes a first mirror ( 202,302 , or 402 ) which is arranged to receive and reflect the EUV light which is reflected from the target substrate, a second mirror ( 204, 304 , or 404 ) which is arranged to receive and reflect the EUV light which is reflected by the first mirror, a third mirror ( 206, 306 , or 406 ) which is arranged to receive and reflect the EUV light which is reflected by the second mirror, and a fourth mirror ( 208, 308 , or 408 ) which is arranged to receive and reflect the EUV light which is reflected by the third mirror.
1. An apparatus for inspecting a photomask using extreme ultra-violet (EUV) light, the apparatus comprising:
an illumination source for generating the EUV light which illuminates a target substrate;
objective optics for receiving and projecting the EUV light which is reflected from the target substrate; and
a sensor for detecting the EUV light which is projected by the objective optics,
wherein the objective optics comprises
a first mirror which is arranged to receive and reflect the EUV light which is reflected from the target substrate,
an opening in the first mirror,
a second mirror which is arranged to receive and reflect the EUV light which is reflected by the first mirror,
a third mirror which is arranged to receive and reflect the EUV light which is reflected by the second mirror, wherein the light reflected by the second mirror passes through the opening in the first mirror in traveling to the third mirror, and
a fourth mirror which is arranged to receive and reflect the EUV light which is reflected by the third mirror.
2. The apparatus of claim 1 , wherein the second mirror partially obscures the first mirror from the EUV light reflected from the target substrate.
3. The apparatus of claim 1 , wherein the first, second, third, and fourth mirrors are, respectively, concave, concave, convex and concave.
4. The apparatus of claim 1 , wherein the first, second, third, and fourth mirrors are, respectively, concave, convex, concave and convex.
5. The apparatus of claim 1 , wherein the first, second, third, and fourth mirrors are, respectively, concave, convex, concave, and concave.
6. The apparatus of claim 1 , wherein the numerical aperture of the objective optics is greater than 0.2.
7. The apparatus of claim 1 , wherein a field of view of the apparatus is at least greater than 5,000 square microns.
8. The apparatus of claim 1 , wherein a distance between the target substrate and the second mirror is greater than 100 millimeters.
9. Objective optics for extreme ultra-violet light formed by an arrangement of mirrors, the objective optics comprising:
a first mirror which is arranged to receive and reflect the EUV light which is reflected from the target substrate;
an opening in the first mirror;
a second mirror which is arranged to receive and reflect the EUV light which is reflected by the first mirror;
a third mirror which is arranged to receive and reflect the EUV light which is reflected by the second mirror, wherein the EUV light reflected by the second mirror passes through the opening in the first mirror before the EUV light is received by the third mirror; and
a fourth mirror which is arranged to receive and reflect the EUV light which is reflected by the third mirror,
wherein the numerical aperture of the objective optics is greater than 0.2.
10. The objective optics of claim 9 , wherein the second mirror partially obscures the first mirror from the EUV light reflected from the target substrate.
11. The objective optics of claim 9 , wherein the first, second, third, and fourth mirrors are, respectively, concave, concave, convex and concave.
12. The objective optics of claim 9 , wherein the first, second, third, and fourth mirrors are, respectively, concave, convex, concave and convex.
13. The objective optics of claim 9 , wherein the first, second, third, and fourth mirrors are, respectively, concave, convex, concave, and concave.
14. The objective optics of claim 9 , wherein a field of view of the apparatus is at least greater than 5,000 square microns.
15. The objective optics of claim 9 , wherein a distance between the target substrate and the second mirror is greater than 100 millimeters.
16. A method of projecting extreme-ultraviolet light reflected from a manufactured substrate to a sensor, the method comprising:
receiving and reflecting the EUV light which is reflected from the manufactured substrate by a first mirror;
receiving and reflecting the EUV light which is reflected from the first mirror by a second mirror;
passing the EUV light reflected from the second mirror through an opening in the first mirror;
receiving and reflecting the EUV light which passed through the opening in the first mirror by a third mirror;
receiving and reflecting the EUV light which is reflected from the third mirror by a fourth mirror; and
detecting the EUV light which is reflected by the fourth mirror.
17. The method of claim 16 , wherein the numerical aperture of the objective optics is greater than 0.2.
18. The method of claim 16 , wherein the second mirror partially obscures the first mirror from the EUV light reflected from the manufactured substrate.