Patent Assignment
Reel/Frame 029609/0651
Assignment of Assignor's Interest
Recorded: 2013-01-11
Pages: 2
Assignors
SCHWAB, MARKUS
Executed: 2006-02-08
GOEHNERMEIER, AKSEL
Executed: 2006-03-01
GRUNER, TORALF
Executed: 2006-01-26
UITTERDIJK, TAMMO
Executed: 2006-02-15
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method of Manufacturing a Miniaturized Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.