Patent Assignment
Reel/Frame 029752/0041
Assignment of Assignor's Interest
Recorded: 2013-02-04
Pages: 4
Assignors
KOSHI, YASUNOBU
Executed: 2012-10-09
NISHIDA, KEIGO
Executed: 2012-10-09
MAEDA, KIYOHIKO
Executed: 2012-10-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Application:
13/758,334 →
Publication:
US 2013/0149846