Patent Assignment
Reel/Frame 029797/0829
Assignment of Assignor's Interest
Recorded: 2013-02-12
Pages: 3
Assignors
KOSHI, YASUNOBU
Executed: 2012-12-18
SUZAKI, KENICHI
Executed: 2012-12-18
YOSHINO, AKIHITO
Executed: 2012-12-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.