Patent Assignment
Reel/Frame 029824/0049
Assignment of Assignor's Interest
Recorded: 2013-02-18
Pages: 4
Assignors
MCINTYRE, EDWARD K
Executed: 2013-01-21
LADNY, EDWARD J
Executed: 2013-01-21
ROBINSON, NATHANIEL
Executed: 2013-01-21
LEE, WILLIAM DAVIS
Executed: 2013-01-21
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Charge Integration Based Electrostatic Clamp Health Monitor
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →