Patent Assignment
Reel/Frame 029902/0369
Assignment of Assignor's Interest
Recorded: 2013-03-01
Pages: 2
Assignors
HSU, CHERN-YOW
Executed: 2013-02-01
LIU, SHIH-CHANG
Executed: 2013-02-01
TSAI, CHIA-SHIUNG
Executed: 2013-02-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Process to Remove Film from Semiconductor Devices