Patent Assignment
Reel/Frame 029923/0369
Assignment of Assignor's Interest
Recorded: 2013-03-05
Pages: 4
Assignors
BUDACH, MICHAEL
Executed: 2013-02-12
BRET, TRISTAN
Executed: 2013-02-12
EDINGER, KLAUS
Executed: 2013-02-12
HOFMANN, THORSTEN
Executed: 2013-02-12
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Apparatus for Analyzing and/or Repairing of an Euv Mask Defect
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.