Patent Assignment
Reel/Frame 029923/0403
Assignment of Assignor's Interest
Recorded: 2013-03-05
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Analyzing and/or Repairing of an Euv Mask Defect
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.