Patent Assignment
Reel/Frame 030027/0261
Assignment of Assignor's Interest
Recorded: 2013-03-18
Pages: 3
Assignors
HSU, DUAN-FU STEPHEN
Executed: 2007-11-20
PARK, JUNG CHUL
Executed: 2007-11-20
VAN DEN BROEKE, DOUGLAS
Executed: 2007-11-20
CHEN, JANG FUNG
Executed: 2007-11-20
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Performing Model-Based OPC for Pattern Decomposed Features
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.