Patent Assignment
Reel/Frame 030042/0204
Assignment of Assignor's Interest
Recorded: 2013-03-19
Pages: 2
Assignors
HATAKEYAMA, JUN
Executed: 2010-07-07
KATAYAMA, KAZUHIRO
Executed: 2010-07-07
OHSAWA, YOUICHI
Executed: 2010-07-07
OHASHI, MASAKI
Executed: 2010-07-07
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Patterning Process and Resist Composition