Patent Assignment
Reel/Frame 030047/0880
Assignment of Assignor's Interest
Recorded: 2013-03-20
Pages: 3
Assignors
SHI, XIAOBO
Executed: 2013-03-12
ZHOU, HONGJUN
Executed: 2013-03-12
LEW, BLAKE J.
Executed: 2013-03-12
SCHLUETER, JAMES ALLEN
Executed: 2013-03-12
SCHWARTZ, JO-ANN T.
Executed: 2013-03-18
Assignee
AIR PRODUCTS AND CHEMICALS, INC.
7201 HAMILTON BLVD., PATENT DEPT., ALLENTOWN, PENNSYLVANIA, 18195-1501
Covered Property
(1)
Chemical Mechanical Planarization for Tungsten-Containing Substrates
Application:
61/777,165 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.