Patent Application
Provisional
App. No. 61/777,165
· Confirmation No. 6208
Chemical Mechanical Planarization for Tungsten-Containing Substrates
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2013-04-04 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-03-20 | OATH |
Oath or Declaration filed | 3 | View | |
| 2013-03-12 | SPEC |
Specification | 23 | View | |
| 2013-03-12 | CLM |
Claims | 29 | View | |
| 2013-03-12 | ABST |
Abstract | 1 | View | |
| 2013-03-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-03-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-03-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Xiaobo Shi
Chandler, AZ
Hongjun Zhou
Chandler, AZ
Blake J. Lew
Scottsdale, AZ
James Allen Schlueter
Phoenix, AZ
Jo-Ann T. Schwartz
Fountain Hills, AZ
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07696Z USA
- Confirmation No.
- 6208
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-02-20
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-03-20
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 61/777,165
- Filed
- 2013-03-12
External Links