Patent Assignment
Reel/Frame 030074/0539
Assignment of Assignor's Interest
Recorded: 2013-03-25
Pages: 6
Assignors
ANDERL, WILLI
Executed: 2013-03-07
KIEREY, HOLGER
Executed: 2013-03-18
BAUER, MARKUS
Executed: 2013-02-07
KUGLER, JENS
Executed: 2013-03-08
Assignee
CARL ZEISS LASER OPTICS GMBH
CARL-ZEISS-STRASSE 22, ., OBERKOCHEN, . 73447, GERMANY
Covered Property
(1)
Euv Collector Mirror Shell of an Euv Collector for Euv Lithography
Application:
13/753,127 →
Publication:
US 2013/0176614
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.