Patent Assignment
Reel/Frame 040107/0391
Merger
Recorded: 2016-09-22
Pages: 6
Assignor
CARL ZEISS LASER OPTICS GMBH
Executed: 2015-04-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Properties
(19)
Optical Arrangement, Littrow Grating for Use in an Optical Arrangement and Also Use of a Littrow Grating
Optical Imaging System for Imaging at Least Two Planes of a Light Beam Spaced Apart in the Beam Direction
Optical Arrangement, Optical Grating and Method for the Manufacture of Such an Optical Grating
Method and Optical Arrangement for Beam Guiding of a Light Beam with Beam Delay
Optical Delay Module for Lengthening the Propagation Path of a Light Beam and Pulse Multiplication or Elongation Module
Optical Devices and Related Systems and Methods
Optical Grating and Method for the Manufacture of Such an Optical Grating
Optical Delay Module for Lengthening the Propagation Path of a Light Beam and Pulse Multiplication or Elongation Module
Method for Measuring a Spectrum of a Narrowband Light Source, and Spectrometer Arrangement
Optical Arrangement, Method of Use, and Method for Determining a Diffraction Grating
Optical System Having Heat Dissipation Arrangement
Reflective Optical Element for Use in an Euv System
Mirror with Dielectric Coating
Euv Collector Mirror Shell of an Euv Collector for Euv Lithography
Application:
13/753,127 →
Publication:
US 2013/0176614
Optical Arrangement for Converting an Incident Light Beam, Method for Converting a Light Beam to a Line Focus, and Optical Device Therefor
Optical Element
Reflective Optical Element for Grazing Incidence in the Euv Wavelength Range
Cooler for Plasma Generation Chamber of Euv Radiation Source
Application:
14/492,949 →
Publication:
US 2015/0083938
Method for Repairing Optical Elements, and Optical Element
Application:
14/519,449 →
Publication:
US 2015/0092170
Related Assignments
(16)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 17, 2003
From: KLEEMAN, BERND; LEMAIRE, MICHEL
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 013970/0401 →
Assignment of Assignor's Interest
Jul 11, 2003
From: HERKOMMER, ALOIS
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 014263/0738 →
Assignment of Assignor's Interest
Oct 20, 2004
From: KLEEMANN, BERND; WEISSENRIEDER, STEFAN; ERXMEYER, JEFFREY; KUSCHNEREIT, RALF
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 015912/0473 →
Assignment of Assignor's Interest
Feb 14, 2005
From: HERKOMMER, ALOIS; MUENZ, HOLGER; SEIFERT, WOLFGANG
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 016259/0057 →
Assignment of Assignor's Interest
Feb 14, 2005
From: HERKOMMER, ALOIS; MUENZ, HOLGER
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 016259/0033 →
Assignment of Assignor's Interest
Sep 1, 2006
From: SHKLOVER, VITALIY; KIEREY, HOLGER; MUENZ, HOLGER; MAIRE, MICHEL LE
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 018227/0047 →
Assignment of Assignor's Interest
Nov 24, 2009
From: KRAUS, JOHANNES; HERKOMMER, ALOIS; WEIGL, BERNHARD; MAIRE, MICHEL LE
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 023566/0187 →
Assignment of Assignor's Interest
Aug 13, 2010
From: KLEEMANN, BERND
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 024834/0110 →
Assignment of Assignor's Interest
Aug 26, 2010
From: KIEREY, HOLGER; MAIRE, MICHEL LE; ANDERL, WILLI; HOLDERER, HUBERT
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 024889/0525 →
Assignment of Assignor's Interest
Oct 13, 2010
From: HOLDERER, HUBERT; LIPPERT, JOHANNES; SCHOEPPACH, ARMIN
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 025134/0169 →
Assignment of Assignor's Interest
Jan 12, 2012
From: HERKOMMER, ALOIS, DR.; MUENZ, HOLGER
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 027523/0406 →
Assignment of Assignor's Interest
Mar 25, 2013
From: ANDERL, WILLI; KIEREY, HOLGER; BAUER, MARKUS; KUGLER, JENS
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 030074/0539 →
Assignment of Assignor's Interest
Jul 31, 2013
From: ERXMEYER, JEFFREY; PAZIDIS, ALEXANDRA; FELDERMANN, HORST
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 030913/0050 →
Assignment of Assignor's Interest
Feb 25, 2014
From: MUENZ, HOLGER
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 032294/0581 →
Assignment of Assignor's Interest
May 8, 2014
From: SHKLOVER, VITALIY; SCHALL, MICHAEL; KRAUS, JOHANNES; GLOECKL, OLIVER
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 032850/0779 →
Assignment of Assignor's Interest
Aug 14, 2014
From: SHKLOVER, VITALIY
To: CARL ZEISS LASER OPTICS GMBH
Reel/Frame 033534/0109 →