Patent Assignment
Reel/Frame 030126/0328
Assignment of Assignor's Interest
Recorded: 2013-04-01
Pages: 12
Assignors
LIAO, KUO-CHANG
Executed: 2008-07-04
SONG, WEIJUN
Executed: 2003-03-03
LIAO, DANG QUAN
Executed: 2002-07-05
Assignee
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
18 ZHANG JIANG RD., PUDONG NEW AREA, SHANGHAI, 201203, CHINA
Covered Property
(1)
Method and Resulting Structure for Deep Trench Polysilicon Hard Mask Removal
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.