Patent Assignment
Reel/Frame 030132/0563
Assignment of Assignor's Interest
Recorded: 2013-04-02
Pages: 4
Assignee
CYMER, INC.
17075 THORNMINT COURT, LEGAL DEPT. M/S 4-2D, SAN DIEGO, CALIFORNIA, 92127-2413
Covered Property
(1)
Euv Light Source Components and Methods for Producing, Using and Refurbishing Same
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.