Assignment of Assignor's Interest

Recorded: 2013-04-04 Pages: 3

Assignor

UMSTADTER, KARL R.

Executed: 2013-04-03

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (3)

Advanced Debris Mitigation of Euv Light Source

Patent: 9,268,031 →

Application: 13/856,328 →

Publication: US 2013/0313423

Advanced Debris Mitigation and Fueling of EUV Light Source

Application: 61/621,711 →

Advanced Debris Mitigation of Euv Light Source

Application: 61/793,948 →