IP Library › Patent Application 61621711
Patent Application Provisional
App. No. 61/621,711 · Confirmation No. 6804

Advanced Debris Mitigation and Fueling of EUV Light Source

Inventor: Karl. R. Umstadter
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-04-19 APP.FILE.REC Filing Receipt 3 View
2012-04-09 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-04-09 SPEC Specification 1 View
2012-04-09 CLM Claims 1 View
2012-04-09 DRW Drawings-only black and white line drawings 7 View
2012-04-09 WFEE Fee Worksheet (SB06) 2 View
2012-04-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/621,711
Filed
2012-04-09