Patent Assignment
Reel/Frame 030187/0307
Assignment of Assignor's Interest
Recorded: 2013-04-10
Pages: 2
Assignor
TSUBOTA, YASUTOSHI
Executed: 2013-02-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.