Patent Assignment
Reel/Frame 030262/0006
Assignment of Assignor's Interest
Recorded: 2013-04-22
Pages: 3
Assignor
GRIMBERGEN, MICHAEL
Executed: 2013-03-06
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Methods for Etching Quartz Substrate in Photomask Manufacturing Applications