Patent Assignment
Reel/Frame 030431/0131
Assignment of Assignor's Interest
Recorded: 2013-05-16
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
A Substrate Temperature Adjusting Method and a Method of Changing the Temperature Control Range of a Heater in a Substrate Processing Apparatus