Patent Assignment
Reel/Frame 030478/0478
Assignment of Assignor's Interest
Recorded: 2013-05-23
Pages: 4
Assignors
NONAKA, YUYA
Executed: 2013-05-23
SHOJI, FUMITAKA
Executed: 2013-05-23
ARAI, HIROKI
Executed: 2013-05-23
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method For Forming Film By Plasma-Assisted Deposition Using Two-Frequency Combined Pulsed RF Power