Patent Assignment
Reel/Frame 030488/0473
Assignment of Assignor's Interest
Recorded: 2013-05-22
Pages: 2
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC. 4, CHUNG HSING RD.,, CHUTUNG, HSINCHU, 31040, TAIWAN
Covered Property
(1)
Polyimide-Containing Layer and Method for Etching Polyimide-Containing Layer